Metallizing of silicon nitride with amorphous active filler metal

• 1 September 1986
• journal article
• Published by Springer Nature in Journal of Materials Science Letters
• Vol. 5  (9) , 855-856
• https://doi.org/10.1007/bf01729250

Abstract

Keywords

• ACTIVE FILLER
• AMORPHOUS ACTIVE
• FILLER METAL
• SILICON NITRIDE
• METALLIZING OF SILICON