Amorphous Silicon Films from Dichlorosilane and Hydrogen
- 1 January 1994
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Chemical effects on the frequencies of Si-H vibrations in amorphous solidsSolid State Communications, 1979
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- Optical Properties and Electronic Structure of Amorphous GermaniumPhysica Status Solidi (b), 1966