Patterning a 50-nm period grating using soft x-ray spatial frequency multiplication

• 1 November 1994
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 12  (6) , 3648-3652
• https://doi.org/10.1116/1.587632

Abstract

Keywords

• SPATIAL FREQUENCY
• NM PERIOD
• RAY SPATIAL
• GRATING USING
• PERIOD GRATING
• FREQUENCY MULTIPLICATION
• USING SOFT
• SOFT X
• PATTERNING