Layer structure evaluation of multilayer x-ray mirror by combination of focused ion beam etching and transmission electron microscopy
- 1 November 1993
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 11 (6) , 2127-2129
- https://doi.org/10.1116/1.586554
Abstract
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