Mix-and-match EBP/optical lithography of 1 Mbit chips
- 1 March 1991
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 13 (1-4) , 357-360
- https://doi.org/10.1016/0167-9317(91)90111-p
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Electron-beam proximity printing of half-micron devicesJournal of Vacuum Science & Technology B, 1989