Comparison of CF 3Cl and C 2 F 6 + Cl2 Plasma Chemistry by Power Modulation

• 1 May 1992
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 139  (5) , 1414-1420
• https://doi.org/10.1149/1.2069422

Abstract