Nanocluster formation by spin coating: Quantitative atomic force microscopy and Rutherford backscattering spectrometry analysis
- 1 March 1996
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 14 (2) , 585-592
- https://doi.org/10.1116/1.589140
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: