Defect control in nanoimprint lithography
- 1 November 2005
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 23 (6) , 2933-2938
- https://doi.org/10.1116/1.2130352
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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