A 2-watt X-band silicon power transistor

Abstract
A silicon power transistor for use atX-band has been developed utilizing e-beam lithography and ion implantation. The transistor has a bar size of 0.5 × 1 mm2and consists of four 27.5 × 75-µm2active cells. With a specially designed package, the combined output power of four cells operating at common base ClassCmode is nearly 2 W CW at 8 GHz and almost 1.5 W CW at 10 GHz.

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