Observation of Si(100) 2*1 surface structure and Si homoepitaxial growth by RHEED.

• 1 January 1989
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 32  (3) , 119-122
• https://doi.org/10.3131/jvsj.32.119

Abstract

Keywords

• HOMOEPITAXIAL GROWTH
• SI HOMOEPITAXIAL
• RHEED
• SURFACE STRUCTURE
• OBSERVATION OF SI