Interfacial reaction between Ta ultrathin films and Si(111) substrate

• 2 October 1987
• journal article
• Published by Elsevier in Surface Science
• Vol. 189-190, 339-345
• https://doi.org/10.1016/s0039-6028(87)80451-x

Abstract

Keywords

• INTERFACIAL REACTION
• ULTRATHIN FILMS
• TA ULTRATHIN
• SUBSTRATE