Behaviours of High-Energy Electrons and Neutral Atoms in the Sputtering of BaTiO₃

• 1 December 1975
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 14  (12) , 1875-1879
• https://doi.org/10.1143/jjap.14.1875

Abstract

Keywords

• SECONDARY ELECTRON