Planar quartz chips with submicron channels for two-dimensional capillary electrophoresis applications
- 1 March 1998
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 8 (1) , 24-28
- https://doi.org/10.1088/0960-1317/8/1/004
Abstract
We have fabricated a planar chip on a fused quartz substrate with a two-dimensional channel array for capillary electrophoresis applications. The first separation dimension consists of a single channel 16 mm long, 80 m wide and 3-7 m deep; the second separation dimension of an array of 500 channels, 5 mm long, 900 nm wide and 3-6 m deep. The channels were fabricated using reactive ion etching under maximum anisotropic etching conditions, yielding an aspect ratio of up to 5 for the narrow channels. The microchannels were closed using a novel NaOH assisted bonding technique.Keywords
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