Heterodyne common path interferometers for surface profilometry and characterization
- 10 December 1989
- journal article
- Published by Elsevier in Materials Science and Engineering: A
- Vol. 122 (1) , 121-125
- https://doi.org/10.1016/0921-5093(89)90783-1
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- New technique of photodisplacement imaging using one laser for both excitation and detectionApplied Physics Letters, 1987
- Optical system for measuring the profiles of super-smooth surfacesPrecision Engineering, 1985
- High-performance real-time heterodyne interferometryApplied Optics, 1979
- Visualization of a Coherent Light Field by Heterodyning with a Scanning Laser BeamApplied Optics, 1969