Chemical Vapor Deposition

• 5 May 1989
• book chapter
• Published by American Chemical Society (ACS)
• p. 199-263
• https://doi.org/10.1021/ba-1989-0221.ch005

Abstract

Keywords

• VAPOR
• REACTING
• THICKNESS
• THERMODYNAMICS
• ILLUSTRATED
• REACTANTS
• CVD
• UNIFORMITY
• PHENOMENA
• OUTLINED