Long-term stability of a Mo/Si multilayer structure
- 1 September 1993
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 32 (25) , 4852-4854
- https://doi.org/10.1364/ao.32.004852
Abstract
The normal-incidence reflectance of a Mo/Si multilayer mirror, with peak reflectance near 130 Å, was measured over a period of 20 months by using synchrotron radiation. The measured reflectances were unchanged over this period of time, and this indicates that the material layers and interfaces were stable.Keywords
This publication has 4 references indexed in Scilit:
- Interfacial reactions on annealing molybdenum-silicon multilayersJournal of Applied Physics, 1989
- An ultrahigh vacuum reflectometer/goniometer for use with synchrotron radiationNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1986
- Features and initial performance tests of the grating/crystal monochromatorNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1986
- Molybdenum-silicon multilayer mirrors for the extreme ultravioletApplied Optics, 1985