A silicon pressure sensor with a low-cost contactless interferometric optical readout
- 29 February 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 30 (3) , 225-230
- https://doi.org/10.1016/0924-4247(92)80125-m
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- A capacitive pressure sensor with low impedance output and active suppression of parasitic effectsSensors and Actuators A: Physical, 1990
- A Review of Fabry-Perot Interferometric SensorsSpringer Proceedings in Physics, 1989
- Prototype Industrial Multi-parameter F.O. Sensor Using White Light InterferometrySpringer Proceedings in Physics, 1989
- Silicon as a mechanical materialProceedings of the IEEE, 1982