Modelling of the mechanical behaviour of a differential capacitor acceleration sensor
- 15 May 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 48 (2) , 101-108
- https://doi.org/10.1016/0924-4247(94)00983-o
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A low cost monolithic accelerometerPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Stress in undoped LPCVD polycrystalline siliconPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A surface micromachined silicon accelerometer with on-chip detection circuitrySensors and Actuators A: Physical, 1994