Surface cleaning using sputtering
- 1 September 1990
- journal article
- Published by Springer Nature in Applied Physics A
- Vol. 51 (3) , 238-251
- https://doi.org/10.1007/bf00324008
Abstract
No abstract availableKeywords
This publication has 90 references indexed in Scilit:
- Computer simulations of sputteringNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Sputtering of frozen gasesNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Investigation of the local atomic arrangement on surfaces using low-energy ion scatteringApplied Physics A, 1985
- Computer simulation of two-component target sputteringApplied Physics A, 1985
- A simple formula for low-energy sputtering yieldsApplied Physics A, 1985
- Tridyn — A TRIM simulation code including dynamic composition changesNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1984
- Sputtering of multicomponent materialsPublished by Springer Nature ,1983
- Electron Diffraction and Surface Defect StructurePublished by Springer Nature ,1977
- AUGER ELECTRON SPECTROSCOPYPublished by Elsevier ,1975
- LV. The absorption of gases in vacuum-tubes, and allied phenomenaJournal of Computers in Education, 1916