Highly efficient and stable radio-frequency — thermal plasma system for the production of ultrafine and ultrapure β-SiC powder
- 1 February 1990
- journal article
- research article
- Published by Springer Nature in Journal of Materials Science
- Vol. 25 (2) , 1058-1065
- https://doi.org/10.1007/bf03372203
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- The Synthesis of Ultrafine Silicon Carbide in a Hybrid PlasmaJournal of the Japan Institute of Metals and Materials, 1987
- Preparation of Ultrafine SiC Powders by the Plasma CVD under Reduced PressureJournal of the Ceramic Association, Japan, 1985
- R.F.-plasma system for the production of ultrafine, ultrapure silicon carbide powderJournal of Materials Science, 1983
- Characterization of a hybrid plasma and its application to a chemical synthesisJournal of Applied Physics, 1983
- The synthesis of ultrafine titanium nitride in an r.f. plasmaJournal of Materials Science, 1979
- The induced plasma torch as a high‐temperature chemical reactor. I. Oxidation of silicon tetrachlorideJournal of Chemical Technology & Biotechnology, 1969
- X-ray line broadening from filed aluminium and wolframActa Metallurgica, 1953