Cathodic Sputtering for Micro-Diffusion Studies
- 1 February 1952
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 23 (2) , 181-183
- https://doi.org/10.1063/1.1702170
Abstract
A method which has been developed to allow uniform removal of micro‐layers of metal from cylindrical specimens is based on sputtering of the metal from the cathode of a gas glow discharge tube. This technique is directly applicable to diffusion studies and offers many advantages over other more common methods.This publication has 3 references indexed in Scilit:
- Theory of Cathode Sputtering in Low Voltage Gaseous DischargesPhysical Review B, 1944
- Kathodenzerst ubungThe European Physical Journal A, 1926
- The Removal of Thorium from the Surface of a Thoriated Tungsten Filament by Positive Ion BombardmentPhysical Review B, 1923