Theoretical studies of Si and GaAs surfaces and initial steps in the oxidation

• 1 July 1978
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 15  (4) , 1274-1286
• https://doi.org/10.1116/1.569753

Abstract

Keywords

• INITIAL STEPS
• THEORETICAL STUDIES
• GAAS SURFACES
• OXIDATION
• STUDIES OF SI