Orientation and morphology of metal films deposited by PVD.

• 1 January 1990
• journal article
• Published by The Surface Finishing Society of Japan in Journal of The Surface Finishing Society of Japan
• Vol. 41  (8) , 823-828
• https://doi.org/10.4139/sfj.41.823

Abstract

Keywords

• METAL FILMS
• FILMS DEPOSITED
• ORIENTATION AND MORPHOLOGY
• DEPOSITED BY PVD