Reactively sputtered titanium resistors, capacitors and rectifiers for microcircuits
- 1 August 1967
- journal article
- Published by Elsevier in Microelectronics Reliability
- Vol. 6 (3) , 213-221
- https://doi.org/10.1016/0026-2714(67)90262-4
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Sputtering in a Crossed Electromagnetic FieldIEEE Transactions on Parts, Materials and Packaging, 1967
- Suppression of Instabilities in a Coaxial DischargeJournal of the Physics Society Japan, 1965
- Thin films of titanium and titanium oxide for microminiaturizationMicroelectronics Reliability, 1965
- Thin-Film Titanium Dioxide Capacitors for Microelectronic ApplicationsIEEE Transactions on Component Parts, 1965
- Sputtered Titanium Oxide Films for Microcircuit ApplicationsIEEE Transactions on Component Parts, 1964
- Structure and Electrical Properties of Evaporated and Sputtered Titanium FilmsAnnalen der Physik, 1963