An investigation of electromagnetic field patterns during microwave plasma diamond thin film deposition
- 1 May 1990
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 8 (3) , 2124-2128
- https://doi.org/10.1116/1.577014
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: