Preparation and properties of Si-containing copolymer for near-UV resist. I. Poly(N-(4-hydroxyphenyl) maleimidealt-p-trimethylisilylstyrene)
- 15 March 1991
- journal article
- research article
- Published by Wiley in Journal of Polymer Science Part A: Polymer Chemistry
- Vol. 29 (3) , 399-410
- https://doi.org/10.1002/pola.1991.080290313
Abstract
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