Conformal Two‐Dimensional SiO2 Layers on Silicon Grown by Low Temperature Corona Discharge
- 1 July 1988
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 135 (7) , 1766-1771
- https://doi.org/10.1149/1.2096115
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: