Preferential sputtering of TiC and TiB2 coatings under D+ and 4He+ bombardment: Partial yields
- 1 April 1982
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 20 (4) , 1304-1308
- https://doi.org/10.1116/1.571567
Abstract
No abstract availableKeywords
This publication has 0 references indexed in Scilit: