Absolute Calibration of Ion Gauges by Means of a Bakeable Adjustable Conductance

• 1 January 1970
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 7  (1) , 270-273
• https://doi.org/10.1116/1.1315816

Abstract

Keywords

• ABSOLUTE CALIBRATION
• ION GAUGES
• CALIBRATION OF ION
• BAKEABLE ADJUSTABLE CONDUCTANCE
• GAUGES BY MEANS