Formation of SiC particles from Si(CH3)Cl3 by a plasma gas phase reaction

• 31 August 1983
• journal article
• Published by Elsevier in Journal of the Less Common Metals
• Vol. 92  (2) , L5-L7
• https://doi.org/10.1016/0022-5088(83)90505-2

Abstract

Funding Information

• Ministry of Education, Culture, Sports, Science and Technology