Strain Compensation in Silicon by Diffused Impurities

• 1 January 1969
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 116  (1) , 73
• https://doi.org/10.1149/1.2411778

Abstract

Keywords

• DIFFUSED IMPURITIES
• SILICON BY DIFFUSED
• STRAIN COMPENSATION IN SILICON