Nb-Oxide-Pb Tunnel Junctions Fabricated Using CF4 Cleaning Process. (III) Preparation of Planar dc SQUID
- 1 October 1987
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 26 (10R)
- https://doi.org/10.1143/jjap.26.1657
Abstract
This paper discusses the preparation of thin-film planar dc superconducting quantum interference devices (SQUIDs). Nb-oxide-Pb tunnel junctions fabricated using CF4 cleaning process (CFCP) and Pd thin-film shunt resistor were employed. It was demonstrated that the two junctions in a SQUID have symmetrical and wellcontrolled junction parameters. Pd adhesion with oxidized Si could be improved by ultrathin Zr underlayers. The Pd films allowed good controt of the sheet resistance. The SQUIDs are very reliable in regard to room-temperature storage and thermal cycling.Keywords
This publication has 9 references indexed in Scilit:
- Planar DC SQUID with a Damping ResistorJapanese Journal of Applied Physics, 1985
- Effect of damping resistance on voltage versus flux relation of a dc SQUID with large inductance and critical currentJournal of Applied Physics, 1985
- Nb and Nb-based A15 compound tunnel junctions fabricated using a new CF4cleaning processIEEE Transactions on Magnetics, 1985
- Nb-Oxide-Pb Josephson Tunnel Junctions Fabricated Using CF4 Cleaning Process (II)Japanese Journal of Applied Physics, 1984
- Fabrication of A15 Nb3Al Josephson Tunnel Junction using CF4 Cleaning ProcessJapanese Journal of Applied Physics, 1983
- Ultra-low-noise tunnel junction dc SQUID with a tightly coupled planar input coilApplied Physics Letters, 1982
- Planar coupling scheme for ultra low noise DC SQUIDsIEEE Transactions on Magnetics, 1981
- Advances in SQUID magnetometersIEEE Transactions on Electron Devices, 1980
- dc SQUID: Noise and optimizationJournal of Low Temperature Physics, 1977