Space Charge in Growing Oxide Films. III. Multispecies Diffusion

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Abstract
Space-charge computations based on the steady-state macroscopic diffusion equation for a single species (previously published in this journal) are extended to several species diffusing simultaneously (e.g., vacancies and holes). The nature of the distribution of each diffusing species as a function of space-charge magnitude, film thickness, and external electric field is markedly different from the case of a single species because of the coupling between the species through the field. Qualitative differences are observed between the ion—electron system and the vacancy—hole system. Power series in position normalized to film thickness provide a formal solution to the coupled equations.

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