Laser photochemical fabrication of phase-controlled 160-nm period gratings by stimulated second-order surface plasma wave scattering
- 1 August 1985
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 47 (3) , 216-218
- https://doi.org/10.1063/1.96222
Abstract
Well-controlled 160-nm period gratings have been fabricated by employing surface plasma wave scattering obtained during laser photodeposition. Extended range phase control and simultaneous period halving have been demonstrated by seeding of second-order scattering in a manner analogous to injection locking and second-Stokes scattering. This technique may be useful for the fabrication of <100-nm period structures.Keywords
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