Roll angle interferometer by means of wave plates
- 1 April 2003
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 104 (2) , 127-131
- https://doi.org/10.1016/s0924-4247(03)00003-7
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Measurement and control of rolling of a precision moving tablePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Sensitivity enhanced roll angle measurementOptical Engineering, 2000
- Development of a Practical Measurement System for Rolling by Means of Laser Interferometry.Journal of the Japan Society for Precision Engineering, 1995