Scanning tunneling microscopy of one-dimensional periodic corrugated silicon surfaces

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Abstract
A scanning tunneling microscope has been used to study atomic step arrays associated with periodically corrugated grating structures on Si(001). These gratings have repeat spacings of 1.5 and 2.0 μm, and amplitudes between 65 and 750 Å. The change in morphology of the gratings with annealing is described. The widths of the (001) terraces at the tops and bottoms of the gratings are observed to be as much as four to five times larger than those for perfect sinusoids. This is consistent with a surface tension singularity at the (001) orientation. The relative areas of the (2×1) and (1×2) dimer domains at the extrema indicate that the gratings may produce additional stresses in the surface.

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