Plasma-surface interactions: The role of charged particle emission
- 1 July 1987
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 5 (4) , 2213-2216
- https://doi.org/10.1116/1.574959
Abstract
It is pointed out that several of the main erosion processes in plasma-surface interactions are governed by electron emission from the solids’ surfaces.Keywords
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