High-speed optical measurement of 3-D surfaces

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Abstract
Micromechanics is placing new demands on surface metrology equipment due to the fragility and small size of the mechanical components being fabricated. For research and development purposes both static measurement of component dimensions and thickness and dynamic measurements of deflection and vibrational amplitude are essential. This paper describes a new laser based non-contacting surface measurement system which is finding increasing application for these tasks. The system employs the dynamic focusing principle and has a measurement range of 1000 micrometers and a vertical resolution of 6 nm. The lateral resolution of the system is 1 micrometers and measurements may be made at up to 10 KHz. A built in observation window allows simultaneous measurement and observation of the measurement spot and surrounding region.© (1993) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

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