Parametric modeling of photoelectron effects in x-ray lithography

• 1 November 1993
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 11  (6) , 2839-2844
• https://doi.org/10.1116/1.586612

Abstract

Keywords

• PARAMETRIC MODEL