An investigation of the vacuum UV spectra of inductivity coupled RF plasmas excited in inert gases as a function of some of the operating parameters
- 1 April 1980
- journal article
- research article
- Published by Wiley in Journal of Polymer Science: Polymer Chemistry Edition
- Vol. 18 (4) , 1233-1246
- https://doi.org/10.1002/pol.1980.170180410
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