Fast, High-Resolution X-ray Microfluorescence Imaging

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Abstract
X-ray micro fluorescence imaging refers to the use of an x-ray beam as a probe to excite XRF in a specimen and produce a spatially resolved image of the element distribution. The advantages of high sensitivity and low background, together with the nondestructive nature of the measurement, have lead to applications of x-ray microfluorescence analysis in biology, geology, materials science, as well as in the area of nondestructive evaluation. Previous reports have described the development of an x-ray microprobe which uses a conventional source of x-rays to produce a 10-μm beam. This paper describes improvements to the microprobe which have increased the beam power and the solid angle of detection. The data collection and display software have also been enhanced.

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