Reactive sputtering of metals in oxidizing atmospheres
- 1 August 1973
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 17 (2) , 163-176
- https://doi.org/10.1016/0040-6090(73)90125-9
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- PLASMA DIAGNOSTICS OF AN rf-SPUTTERING GLOW DISCHARGEApplied Physics Letters, 1971
- A spectroscopic investigation of the reactive sputtering of aluminiumThin Solid Films, 1971
- Charge Phenomena in dc Reactively Sputtered SiO2 FilmsJournal of Applied Physics, 1968
- The mechanism of reactive sputteringJournal of Materials Science, 1968
- Effect of Oxygen on the rf-Sputtering Rate of SiO2Journal of Vacuum Science and Technology, 1968