Frequency Dependence of RF Discharge in Low Pressure SF6 Gas.

• 1 January 1992
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 35  (3) , 356-359
• https://doi.org/10.3131/jvsj.35.356

Abstract

Keywords

• FREQUENCY DEPENDENCE
• PRESSURE SF6
• SF6 GAS
• RF DISCHARGE
• LOW PRESSURE