High-Q integrated on-chip micro-ring resonator
- 23 December 2004
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 745-746
- https://doi.org/10.1109/leos.2004.1363454
Abstract
We report a fully integrated high-Q factor micro-ring resonator using silicon nitride/dioxide on a silicon wafer. The micro-ring resonator is critically coupled to a low loss straight waveguide. An intrinsic quality factor of 2.4/spl times/10/sup 5/ has been measured.Keywords
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