Hardness, internal stress and fracture toughness of epitaxial AlxGa1−xAs films
- 1 October 1994
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 250 (1-2) , 157-163
- https://doi.org/10.1016/0040-6090(94)90180-5
Abstract
No abstract availableKeywords
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