Markle–Dyson optics for 0.25 μm lithography and beyond

• 1 November 1991
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 9  (6) , 3108-3112
• https://doi.org/10.1116/1.585321

Abstract