Optical scanners realized by surface-micromachined vertical torsion mirror
- 1 May 1999
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 11 (5) , 587-589
- https://doi.org/10.1109/68.759407
Abstract
We report on a novel vertical torsion mirror fabricated by surface-micromachining for optical scanner applications. Driven by an electrostatic actuator, the scanning mirror has a resonant frequency of 0.5 kHz and an optical scan range of 26/spl deg/. The maximum achievable number of resolvable spots for this 300 μm×250 μm scanner is 238.Keywords
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