Gegeneration of a Microwave Plasma Using Traveling Waves
- 1 January 1989
- journal article
- research article
- Published by Taylor & Francis in Journal of Microwave Power and Electromagnetic Energy
- Vol. 24 (3) , 140-149
- https://doi.org/10.1080/08327823.1989.11688087
Abstract
A uniform and active 2.45 GHz microwave plasma is generated with traveling waves in a large area, 180 x300 mm2, along a dielectric line. The brightness temperature of the Ar plasma is within 644°C ± 17°C. The electron temperature and density at 200 Pa are about 4 eV and 4 x1011 cm-3 respectively, and of the same order with these in small microwave plasma generators. The plasma area can easily be enlarged.Keywords
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