Implantation of Rare-Earth Atoms into Si and III-V Compounds

• 1 January 1993
• journal article
• Published by Institute of Physics, Polish Academy of Sciences in Acta Physica Polonica A
• Vol. 83  (1) , 59-70
• https://doi.org/10.12693/aphyspola.83.59

Abstract

Keywords

• RARE EARTH
• EARTH ATOMS
• IMPLANTATION OF RARE
• III
• COMPOUNDS