The Nature and Diffusion of Intrinsic Point Defects in SiC

• 1 April 2002
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 389-393, 471-476
• https://doi.org/10.4028/www.scientific.net/msf.389-393.471

Abstract

Keywords

• DEFECT COMPLEXES
• INTERSTITIAL
• SELF-DIFFUSION
• VACANCY